JPH046151Y2 - - Google Patents

Info

Publication number
JPH046151Y2
JPH046151Y2 JP1986082047U JP8204786U JPH046151Y2 JP H046151 Y2 JPH046151 Y2 JP H046151Y2 JP 1986082047 U JP1986082047 U JP 1986082047U JP 8204786 U JP8204786 U JP 8204786U JP H046151 Y2 JPH046151 Y2 JP H046151Y2
Authority
JP
Japan
Prior art keywords
cooling
vacuum
support member
heating device
sheathed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986082047U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62193693U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986082047U priority Critical patent/JPH046151Y2/ja
Publication of JPS62193693U publication Critical patent/JPS62193693U/ja
Application granted granted Critical
Publication of JPH046151Y2 publication Critical patent/JPH046151Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP1986082047U 1986-05-30 1986-05-30 Expired JPH046151Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986082047U JPH046151Y2 (en]) 1986-05-30 1986-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986082047U JPH046151Y2 (en]) 1986-05-30 1986-05-30

Publications (2)

Publication Number Publication Date
JPS62193693U JPS62193693U (en]) 1987-12-09
JPH046151Y2 true JPH046151Y2 (en]) 1992-02-20

Family

ID=30934347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986082047U Expired JPH046151Y2 (en]) 1986-05-30 1986-05-30

Country Status (1)

Country Link
JP (1) JPH046151Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197878A (ja) * 1984-03-21 1985-10-07 Canon Inc 冷却方法
JPS6223927A (ja) * 1985-07-24 1987-01-31 Mitsubishi Electric Corp 冷却管つき加熱ヒ−タ−を備えた真空加熱装置

Also Published As

Publication number Publication date
JPS62193693U (en]) 1987-12-09

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